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Products & Services

Wet Benches

Trio-Tech’s wet bench business segment designs, develops and manufactures cleaning, rinsing and drying wet stations for processing silicon wafers, flat panel displays and other microelectronic substrates.Our manual, semi-automated and fully-automated wet stations are customized to meet customers’ requirements (such as pre-diffusion cleaning, nitride films etching and photo resist stripping etc).

All our equipment comply with SEMI (S2-93) manufacturing safety guidelines and FM-200 standards. The bench materials are also SS, PP and FM-4910 approved.One of the first considerations when contemplating a wet process station is the general station configuration and design.

Depending on the type of chemicals to be used, it may be necessary to utilize an enclosed Fumehood design instead of an open bench design, especially in order to minimize fumes in the work area.

Automated Wet Station

For higher volume applications, or if repeatable handling is critical, it is worthwhile considering Universal Systems' VLF-2002 Series of automated wet process stations - designed to provide maximum device throughput, operator safety and ease of use. Operator errors are virtually eliminated through the use of SMARTware scheduling software.

Features:

  • Linear Robot Transfer Systems
  • Proprietary design allows for quick & smooth transfer of product from tank to tank
  • Max. velocity is 24 in./sec at rated load,vertical axis
  • Max acceleration 48 in./sec at rated load, horizontal axis
  • 50-100 lb load capacity
  • PC control

Semi-Automated Wet Station

The US Model US-VLF Semi-Automated Wet Station includes all the features of our manual wet process stations plus several additional features for faster and more reliable processing.

The US-VLF family of products is ideal for critical timing of process chemicals, handling of product through hazardous chemical baths or similar applications where operator-assisted processing is recommended.

Features:

  • Pneumatic/Servomotor Robotic Systems
  • Natural polypropylene housing with N2 purge
  • Rotation capabilities of 0-180 º C
  • 30 lb/50lb load capacity
  • PLC / PC Control

Fumehoods

One of the first considerations when contemplating a wet process station is the general station configuration and design. Depending on the type of chemicals to be used, it may be necessary to utilize an enclosed Fumehood design instead of an open bench design, especially in order to minimize fumes in the work area.

Our Fumehoods are designed for end-of-process cleaning or solvent process operations where fume containment is the primary concern.

Many of the same features of our wet process stations are included in the design of Universals Fumehoods.

Process Tanks

We offer a variety of standard and custom designed process tanks for almost any application.

Our wide range of tanks include:

  • Ambient Tank, Overflow Cascade Rinser, Utility Sink, Quick Dump Rinser
  • Low/Medium/ High Temperature, Re-circulating,Filtered Tanks
  • Ultrasonic Tank
  • Megasonic Tank
  • N2/IPA Drying Tank
Tank Materials : PP, PVDF, PFA , Quartz, SS

Transfer Arms

Robot transfer arms are extremely helpful for wet process applications that require precise, repeatable operations especially where dangerous chemicals are used in the process baths. In some cases the weight of the process materials requires mechanical assistance, especially when larger diameter substrates or multiple cassettes are processed.

Pneumatic Robot Transfer System :

  • Natural polypropylene housing with N2 purge.
  • Rotation capabilities of 0-180°C
  • 30lb. Load capacity
  • PLC Control

Servomotor Robot Transfer System :

  • Plastic housing with N2 purge.
  • Rotation capabilities of 0-180°C
  • 50lbs. Load capacity
  • PLC or PC control

Linear Robot Transfer System :

  • Proprietary design allows for quick & smooth transfer of product from tank to tank
  • Max. velocity is 24in./sec at rated load, vertical axis.
  • Max. acceleration 48in./sec at rated load, horizontal axis.
  • 50 - 100 lb. load capacity
  • PC Control

Process Controllers

We offer several types of controllers for almost any application - from basic tank auto-drain functions to complex, but easy-to-use, PC recipe storage, activation and process monitoring.

Technical Bulletin No. CTRLS.01-01 describes the features of our controllers, especially our PC/PLC-based systems, including sample PC screens which illustrate the range of capabilities available using our powerful, but easy-to-use, PC-based controllers.

Emergency Power Off - Process Tank Controller

Quick Dump Rinse Controller

  • 0-99 Dump cycles
  • Dump duration
  • Adjustable control cycles & remote start/stop capability
  • Individual touch-tone process controller
  • EEPROM microprocessor
  • Timed or liquid level sensor fill cycles programmable

Chemical Dispensing Systems

We offer chemical handling equipment in order to provide a total customer solution. Our product range includes the Series CD-2002 Chemical Blending equipment which provides automatic, precisely controlled chemical transport from a house supply to our process equipment, using our latest PC/PLC based control systems or individual controllers.

Our Bulk Chemical Dispensing systems are available for our full range of wet process equipment.

For more information on the products or if you require a quotation, do feel free to or fill in the form.

 
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