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ARTIC TEMPERATURE CHUCK

The Artic TC series of temperature controlled chucks are used for test and characterization and failure analysis of semiconductor wafers and other components at hot and cold temperatures.

Each system comprises a temperature controlled chuck and sophisticated PID controller. Model TC2000 is provided with a cooler / heat exchanger for operation at temperatures below ambient. Models TC6000 and TC8000 are supplied with a self contained chiller.

Precision Temperature Control

Chucks are available in 4, 6 and 8 inches diameters to accommodate wafers of different sizes. The Chuck surface is gold plated and has independent vacuum lines for holding the wafers.

The ARTIC Temperature Chucks have many advanced design features which ensure excellent thermal, electrical and mechanical performance with high reliability.

Mechanical interface kits and dedicated configurations are available to adapt the ARTIC Temperature Chucks to most probing stations.

Wide Temperature Range

Model

Range

TC2000

0°C to +200°C

TC4000

Amb to +300°C

TC6000

-65°C to +135°C

TC8000

-65°C to +200°C

气动机械传输系统

Stability +/- 0°C 

User Friendly Controller

Touch Screen Operation IEEE 488.2 & R232C interfaces

Unique Mechanical

Minimizes thermal expansion

 Complete Family of Chucks

Four Standard models are available.:

TC 2000 0°C to +200°C

TC 4000 Amb to +300°C

TC 6000 -65 °C to +135°C

TC 8000 -65 °C to +200°C

Chucks which operate over other temperature ranges are also available for special applications.

Temperature Chuck Weights and Dimensions

Chuck

Actual Diameter

Height

Weight

4 inch (102mm)

4.25 inch (108mm)

1.10inches (28mm)

2 lbs (0.9kg)

6 inch (152mm)

6.25 inch (159mm)

1.10inches (28mm)

3 lbs (1.4kg)

8 inch (203mm)

8.25 inch (210mm)

1.10 inches (28mm)

6 lbs (2.7kg)

Power Requirements , System Weights and Dimension

Unit

Power

Width

Height

Depth

Weight

TC 1000* Controller

115v/18A 220V/10A

 

24 inch* (610mm)

 

 

7 inch (180mm)

 

 

24 inch (610mm)

 

50lbs (22.47kg)

RCL500 Cooler * TC2000 chucks

 

115v/5A 220V/3A

 

 

24 inch* (610mm)

 

 

10 inch (225mm)

 

 

24 inch (610mm)

 

45lbs
(20.4kg)

RCL502 Cooler TC2000/TC4000

 

115v/5A 220V/3A

 

 

8 inch* (203mm)

 

 

12 inch (305mm)

 

 

16 inch (406mm)

 

23lbs (10.40kg)

RCL2000 Chiller TC6000/TC8000

 

220V/25A
3 phase



 

21 inch* (535mm)

 

 

48 inch (1213mm)

 

 

29 inch (740mm)

 

390lbs (177.3mm)

*Specifications may change without notice

For more information on the products or if you require a quotation, do feel free to or fill in the form.

 
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